Microelectromechanical systems.

Overview
Works: 32 works in 22 publications in 22 languages
Titles
Microdevices in biology and medicine / by: (Language materials, printed)
Introduction to microfabrication / by: (Language materials, printed)
Sensors for mechatronics[electronic resource] / by: (Language materials, printed)
Biomaterials for MEMS[electronic resource] / by: (Language materials, printed)
Microrobotics :methods and applications / by: (Language materials, printed)
Micro- and nanoelectromechanical biosensors / by: (Language materials, printed)
RF MEMS and their applications / by: (Language materials, printed)
MEMS packaging[electronic resource] / by: (Electronic resources)
Subjects
 
 
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