| 紀錄類型: |
書目-電子資源
: Monograph/item
|
| 杜威分類號: |
621.381/046 |
| 書名/作者: |
Advanced MEMS packaging/ John H. Lau ... [et al.]. |
| 其他題名: |
Advanced microelectromechanical systems packaging. |
| 其他作者: |
Lau, John H. |
| 出版者: |
New York : : McGraw-Hill,, c2010. |
| 面頁冊數: |
xxiii, 552 p. : : ill. |
| 標題: |
Microelectromechanical systems. |
| 標題: |
Microelectronic packaging. |
| ISBN: |
9780071626231 |
| ISBN: |
0071626239 |
| ISBN: |
9789780071622 |
| 內容註: |
Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices. |
| 電子資源: |
Click for full text (McGrawHill) |