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Introduction to microfabrication /

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Franssila, Sami.

Introduction to microfabrication /

Record Type:	Language materials, printed : Monograph/item
[NT 15000414]:	621.3
Title/Author:	Introduction to microfabrication // Sami Franssila.
Author:	Franssila, Sami.
Published:	Chichester, West Sussex, England ; : J. Wiley,, c2004.
Description:	xvii, 401 p. : : ill. ;; 26 cm.
Subject:	Electronic apparatus and appliances.
Subject:	Microelectromechanical systems.
Subject:	Microfabrication.
ISBN:	0470851066 (pbk.)
ISBN:	9780470851067 (pbk.) :
ISBN:	0470851058 (hbk.)
[NT 15000227]:	Includes bibliographical references and index.
Online resource:	http://www.loc.gov/catdir/toc/wiley041/2004004940.html
Online resource:	http://www.loc.gov/catdir/description/wiley041/2004004940.html

Introduction to microfabrication /
Franssila, Sami.

Introduction to microfabrication /Sami Franssila. - Chichester, West Sussex, England ;J. Wiley,c2004. - xvii, 401 p. :ill. ;26 cm.

Includes bibliographical references and index.

ISBN: 0470851066 (pbk.)Subjects--Topical Terms:

341077
Electronic apparatus and appliances.

Dewey Class. No.: 621.3

Introduction to microfabrication /
LDR:00749cam 22001934a 4500 001 342367
005 20110617143226.0
008 110715s2004 enka b 001 0 eng
020 $a 0470851066 (pbk.)
020 $a 9780470851067 (pbk.) : $c NTD 978
020 $a 0470851058 (hbk.)
040 $a DLC $c DLC $d DLC $d DYU
041 0 $a eng
082 0 0 $a 621.3 $2 22
100 1 $a Franssila, Sami. $3 418428
245 1 0 $a Introduction to microfabrication / $c Sami Franssila.
260 $a Chichester, West Sussex, England ; $a Hoboken, NJ : $b J. Wiley, $c c2004.
300 $a xvii, 401 p. : $b ill. ; $c 26 cm.
504 $a Includes bibliographical references and index.
650 0 $a Electronic apparatus and appliances. $3 341077
650 0 $a Microelectromechanical systems. $3 343612
650 0 $a Microfabrication. $3 344153
856 4 1 $3 Table of contents $u http://www.loc.gov/catdir/toc/wiley041/2004004940.html
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/description/wiley041/2004004940.html

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Items

1 records • Pages 1 •
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Inventory Number

No. of reservations

80013892

四樓西文圖書區

1.圖書流通

圖書(book)

621.3 F835

1.一般(Normal)

On shelf

0

1 records • Pages 1 •
1

Multimedia

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http://www.loc.gov/catdir/toc/wiley041/2004004940.html
http://www.loc.gov/catdir/description/wiley041/2004004940.html

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