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Fundamentals of microfabrication and...

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	620/.5
書名/作者:	Fundamentals of microfabrication and nanotechnology // Marc J. Madou.
作者:	Madou, Marc J.
出版者:	Boca Raton, FL : : CRC Press,, c2012.
面頁冊數:	3 v. : : ill. (some col.) ;; 29 cm.
標題:	Microelectromechanical systems.
標題:	Nanoelectromechanical systems.
標題:	Microfluidics.
標題:	Solid state physics.
ISBN:	9781420055160 (hbk. : v. 3) :
ISBN:	142005516X (hbk. : v. 3)
ISBN:	9780849331800 (hbk. : set)
ISBN:	0849331803 (hbk. : set)
ISBN:	9781420055115 (hbk. : v. 1)
ISBN:	1420055119 (hbk. : v. 1)
ISBN:	9781420055191 (hbk. : v. 2)
ISBN:	1420055194 (hbk. : v. 2)
書目註:	Includes bibliographical references and indexes.
內容註:	v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
摘要、提要註:	"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
電子資源:	Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).

Fundamentals of microfabrication and nanotechnology /
Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /Marc J. Madou. - 3rd ed. - Boca Raton, FL :CRC Press,c2012. - 3 v. :ill. (some col.) ;29 cm.

Includes bibliographical references and indexes.

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.

"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--

ISBN: 9781420055160 (hbk. : v. 3) :NTD 3,040

LCCN: 2011014406Subjects--Topical Terms:

343612
Microelectromechanical systems.

LC Class. No.: TK7875 / .M33 2012

Dewey Class. No.: 620/.5

Fundamentals of microfabrication and nanotechnology /
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020 $a 142005516X (hbk. : v. 3)
020 $a 9780849331800 (hbk. : set)
020 $a 0849331803 (hbk. : set)
020 $a 9781420055115 (hbk. : v. 1)
020 $a 1420055119 (hbk. : v. 1)
020 $a 9781420055191 (hbk. : v. 2)
020 $a 1420055194 (hbk. : v. 2)
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050 0 0 $a TK7875 $b .M33 2012
082 0 0 $a 620/.5 $2 23
100 1 $a Madou, Marc J. $3 461849
245 1 0 $a Fundamentals of microfabrication and nanotechnology / $c Marc J. Madou.
250 $a 3rd ed.
260 $a Boca Raton, FL : $b CRC Press, $c c2012.
300 $a 3 v. : $b ill. (some col.) ; $c 29 cm.
504 $a Includes bibliographical references and indexes.
505 0 $a v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
520 $a "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- $c Provided by publisher.
520 $a "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- $c Provided by publisher.
650 0 $a Microelectromechanical systems. $3 343612
650 0 $a Nanoelectromechanical systems. $3 461850
650 0 $a Microfluidics. $3 444854
650 0 $a Solid state physics. $3 418421
856 $u http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 $z Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).