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Poly-SiGe for MEMS-above-CMOS sensor...

De Meyer, Kristin.

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.381
書名/作者:	Poly-SiGe for MEMS-above-CMOS sensors/ by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
作者:	Gonzalez Ruiz, Pilar.
其他作者:	De Meyer, Kristin.
出版者:	Dordrecht : : Springer Netherlands :, 2014.
面頁冊數:	xvi, 199 p. : : ill., digital ;; 24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems.
標題:	Metal oxide semiconductors, Complementary.
標題:	Polycrystals.
標題:	Physics.
標題:	Electronic Circuits and Devices.
標題:	Circuits and Systems.
標題:	Optical and Electronic Materials.
標題:	Nanotechnology and Microengineering.
標題:	Characterization and Evaluation of Materials.
ISBN:	9789400767997 (electronic bk.)
ISBN:	9789400767980 (paper)
電子資源:	http://dx.doi.org/10.1007/978-94-007-6799-7

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /
Gonzalez Ruiz, Pilar.

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw. - Dordrecht :Springer Netherlands :2014. - xvi, 199 p. :ill., digital ;24 cm. - Springer series in advanced microelectronics,v.441437-0387 ;. - Springer series in advanced microelectronics ;33..

ISBN: 9789400767997 (electronic bk.)Subjects--Topical Terms:

343612
Microelectromechanical systems.

LC Class. No.: TK7875 / .G66 2014

Dewey Class. No.: 621.381

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /
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650 2 4 $a Circuits and Systems. $3 463473
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