Microelectromechanical systems
概観
| 著作: | 20 作品に 17 出版物中に 17 言語 | |
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タイトル
Nano-and microelectromechanical systems :fundamentals of nano-and microengineering
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4M2006[electronic resource] :Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France /
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Micromechanics and microactuators[electronic resource] :proceedings of MAMM 2010, Aachen, Germany, May 27-29, 2010 /
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Micro mechanical transducers[electronic resource] :pressure sensors, accelerometers, and gyroscopes /
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MEMS and nanotechnology.[electronic resource] :proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics /Volume 8
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MEMS and nanotechnology.[electronic resource] /proceedings of the 2013 Annual Conference on Experimental and Applied MechanicsVolume 5 :
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