Microelectromechanical systems
Overview
| Works: | 20 works in 17 publications in 17 languages | |
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Titles
Nano-and microelectromechanical systems :fundamentals of nano-and microengineering
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Microstereolithography and other fabrication techniques for 3D MEMS
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Smart material systems and MEMS : design and development methodologies
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4M2006[electronic resource] :Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France /
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Micromechanics and microactuators[electronic resource] :proceedings of MAMM 2010, Aachen, Germany, May 27-29, 2010 /
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Precision assembly technologies and systems[electronic resource] :6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, Chamonix, France, February 12-15, 2012 : proceedings /
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Micro mechanical transducers[electronic resource] :pressure sensors, accelerometers, and gyroscopes /
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MEMS and nanotechnology.[electronic resource] :proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics /Volume 8
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MEMS and nanotechnology.[electronic resource] /proceedings of the 2013 Annual Conference on Experimental and Applied MechanicsVolume 5 :
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MEMS and nanotechnology.[electronic resource] :Proceedings of the 2015 Annual Conference on Experimental and Applied Mechanics /Volume 5
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Integrated microsystems[electronic resource] :electronics, photonics, and biotechnology /
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Subjects