大葉大學圖書館 |

Micro mechanical transducers[electronic resource] :pressure sensors, accelerometers, and gyroscopes /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	681/.2
書名/作者:	Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes // Min-Hang Bao.
作者:	Bao, Min-Hang.
出版者:	Amsterdam ; : Elsevier,, 2000.
面頁冊數:	1 online resource (xiv, 378 p.) : : ill.
標題:	Transducers
標題:	Microelectromechanical systems
ISBN:	9780444505583
ISBN:	044450558X
書目註:	Includes bibliographical references and index.
內容註:	Preface. Chapter 1 -- Introduction to micro mechanical transducers. Chapter 2 -- Basic mechanics of beam and diaphragm structures. Chapter 3 -- Air damping. Chapter 4 -- Electrostatic driving and capacitive sensing. Chapter 5 -- Piezoresistive sensing. Chapter 6 -- Piezoresistive pressure transducers. Chapter 7 -- Piezoresistive accelerometers. Chapter 8 -- Capacitive pressure transducers and accelerometers. Chapter 9 -- Resonant sensors and vibratory gyroscopes. Subject Index.
摘要、提要註:	Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
電子資源:	http://www.sciencedirect.com/science/book/9780444505583

Micro mechanical transducers[electronic resource] :pressure sensors, accelerometers, and gyroscopes /
Bao, Min-Hang.

Micro mechanical transducerspressure sensors, accelerometers, and gyroscopes /[electronic resource] :Min-Hang Bao. - Amsterdam ;Elsevier,2000. - 1 online resource (xiv, 378 p.) :ill. - Handbook of sensors and actuators ;v. 8. - Handbook of sensors and actuators ;v. 8..

Includes bibliographical references and index.

Preface. Chapter 1 -- Introduction to micro mechanical transducers. Chapter 2 -- Basic mechanics of beam and diaphragm structures. Chapter 3 -- Air damping. Chapter 4 -- Electrostatic driving and capacitive sensing. Chapter 5 -- Piezoresistive sensing. Chapter 6 -- Piezoresistive pressure transducers. Chapter 7 -- Piezoresistive accelerometers. Chapter 8 -- Capacitive pressure transducers and accelerometers. Chapter 9 -- Resonant sensors and vibratory gyroscopes. Subject Index.

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

ISBN: 9780444505583

Source: 126655:128076Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

138066
Transducers
Index Terms--Genre/Form:

336502
Electronic books.

LC Class. No.: TJ223.T75 / B36 2000eb

Dewey Class. No.: 681/.2

Micro mechanical transducers[electronic resource] :pressure sensors, accelerometers, and gyroscopes /
LDR:03425cam 2200313Ia 4500 001 370615
005 20120813083439.0
006 m d
007 cr cn|||||||||
008 121228s2000 ne a obf 001 0 eng d
020 $a 9780444505583
020 $a 044450558X
029 1 $a NZ1 $b 12434630
035 $a ocn162131197
037 $a 126655:128076 $b Elsevier Science & Technology $n http://www.sciencedirect.com
040 $a OPELS $b eng $c OPELS $d OPELS $d OCLCQ
049 $a NTYA
050 4 $a TJ223.T75 $b B36 2000eb
072 7 $a TJ $2 lcco
082 0 4 $a 681/.2 $2 22
100 1 $a Bao, Min-Hang. $3 416288
245 1 0 $a Micro mechanical transducers $h [electronic resource] : $b pressure sensors, accelerometers, and gyroscopes / $c Min-Hang Bao.
260 $a Amsterdam ; $a New York : $b Elsevier, $c 2000.
300 $a 1 online resource (xiv, 378 p.) : $b ill.
490 1 $a Handbook of sensors and actuators ; $v v. 8
504 $a Includes bibliographical references and index.
505 0 $a Preface. Chapter 1 -- Introduction to micro mechanical transducers. Chapter 2 -- Basic mechanics of beam and diaphragm structures. Chapter 3 -- Air damping. Chapter 4 -- Electrostatic driving and capacitive sensing. Chapter 5 -- Piezoresistive sensing. Chapter 6 -- Piezoresistive pressure transducers. Chapter 7 -- Piezoresistive accelerometers. Chapter 8 -- Capacitive pressure transducers and accelerometers. Chapter 9 -- Resonant sensors and vibratory gyroscopes. Subject Index.
520 $a Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
588 $a Description based on print version record.
650 0 $a Transducers $3 138066
650 0 $a Microelectromechanical systems $3 174402
655 4 $a Electronic books. $2 local $3 336502
776 0 8 $i Print version: $a Bao, Min-Hang. $t Micro mechanical transducers. $d Amsterdam ; New York : Elsevier, 2000 $z 044450558X $z 9780444505583 $w (DLC) 00056162 $w (OCoLC)44468904
830 0 $a Handbook of sensors and actuators ; $v v. 8. $3 486289
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780444505583