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Mechanical microsensors
~
ElwenspoekM.
Mechanical microsensors
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Mechanical microsensors/ Elwenspoek,M.;Wiegerink,R.
Author:
ElwenspoekM.
other author:
WiegerinkR.
Published:
Berlin : Springer-Verlag, 2000
Description:
293頁
Subject:
Detectors--Design and const..
Subject:
Mircroelectromechical system..
Subject:
Transducers.
ISBN:
3540675825(精裝)
Mechanical microsensors
ElwenspoekM.
Mechanical microsensors
Elwenspoek,M.;Wiegerink,R. - 1ST ED. - BerlinSpringer-Verlag2000 - 293頁
ISBN: 3540675825(精裝)Subjects--Topical Terms:
181064
Detectors--Design and const..
Mechanical microsensors
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