Silicon - Electric properties.

Handbook of silicon based MEMS[electronic resource] :materials & technologies / by: (Language materials, printed)

Single-electron devices and circuits in silicon[electronic resource] / by: (Language materials, printed)

Into the nano era[electronic resource] :Moore's law beyond planar silicon CMOS / by: (Language materials, printed)

Handbook of silicon based MEMS materials and technologies[electronic resource] / by: (Electronic resources)

Smart electronic systems[electronic resource] :heterogeneous integration of silicon and printed electronics / by: (Electronic resources)

Microelectromechanical systems.

Silicon

Microelectromechanical systems

Nanostructured materials.

Silicon

Electronic apparatus and appliances.

Chemistry.

Nanotechnology.

Electronics and Microelectronics, Instrumentation.

Silicon

Condensed Matter.

Semiconductors

Optical and Electronic Materials.

Integrated circuits

Microelectromechanical systems.

Silicon

Microelectromechanical systems

Silicon

Printed electronics.