紀錄類型: |
書目-電子資源
: Monograph/item
|
杜威分類號: |
621.3815/2 |
書名/作者: |
Ultrathin two-dimensional semiconductors for novel electronic applications/ Mohammad Karbalaei Akbari, Serge Zhuiykov. |
作者: |
Akbari, Mohammad Karbalaei. |
其他作者: |
Zhuiykov, Serge. |
出版者: |
Boca Raton, FL : : CRC Press,, 2021. |
面頁冊數: |
1 online resource. |
標題: |
Semiconductor films. |
標題: |
Thin film devices. |
ISBN: |
9780429316784 |
書目註: |
Includes bibliographical references and index. |
摘要、提要註: |
"Offering perspective on scientific and engineering aspects of 2D oxide semiconductors, this book discusses how to successfully engineer 2D metal oxides for practical applications. The work provides comprehensive data about wafer-scale deposition of 2D oxide semiconductors, from scientific discussions up to the planning of experiments and reliability testing of fabricated samples. It discusses wafer-scale ALD of 2D metal oxides and investigates ALD techniques. It covers sub-nanometer surface functionalization and device fabrication and post-treatment. It addresses a range of scientific and practical applications of 2D oxide materials for electronic and optoelectronic devices"-- |
電子資源: |
https://www.taylorfrancis.com/books/9780429316784 |