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Plasma electronics :applications in ...

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Makabe, T.

Plasma electronics :applications in microelectronic device fabrication /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.044
書名/作者:	Plasma electronics : : applications in microelectronic device fabrication // Toshiaki Makabe, Zoran Lj. Petrovic.
作者:	Makabe, T.
其他作者:	Petrović, Z.
出版者:	Boca Raton : : CRC Press, Taylor & Francis Group,, c2015.
面頁冊數:	xxxv, 376 p. : : ill. ;; 24 cm.
標題:	Plasma engineering.
ISBN:	9781482222050 (hbk.) :
書目註:	Includes bibliographical references and index.

Plasma electronics :applications in microelectronic device fabrication /
Makabe, T.

Plasma electronics :applications in microelectronic device fabrication /Toshiaki Makabe, Zoran Lj. Petrovic. - 2nd ed. - Boca Raton :CRC Press, Taylor & Francis Group,c2015. - xxxv, 376 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9781482222050 (hbk.) :NTD 5,056

LCCN: 2014016456Subjects--Topical Terms:

573764
Plasma engineering.

LC Class. No.: TA2020 / .M35 2015

Dewey Class. No.: 621.044

Plasma electronics :applications in microelectronic device fabrication /
LDR:00611cam a2200181 a 4500 001 468291
005 20150414170246.0
008 170613s2015 flua b 001 0 eng c
010 $a 2014016456
020 $a 9781482222050 (hbk.) : $c NTD 5,056
040 $a OU/DLC $b eng $c OU $d DLC $d DYU
041 0 $a eng
050 0 0 $a TA2020 $b .M35 2015
082 0 0 $a 621.044 $2 23
100 1 $a Makabe, T. $q (Toshiaki) $3 673794
245 1 0 $a Plasma electronics : $b applications in microelectronic device fabrication / $c Toshiaki Makabe, Zoran Lj. Petrovic.
250 $a 2nd ed.
260 $a Boca Raton : $b CRC Press, Taylor & Francis Group, $c c2015.
300 $a xxxv, 376 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Plasma engineering. $3 573764
700 1 $a Petrović, Z. $3 673795

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