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Helium Ion microscopy[electronic resource] /

紀錄類型:	書目-電子資源 : Monograph/item
杜威分類號:	578.1
書名/作者:	Helium Ion microscopy/ edited by Gregor Hlawacek, Armin Golzhauser.
其他作者:	Hlawacek, Gregor.
出版者:	Cham : : Springer International Publishing :, 2016.
面頁冊數:	xxiii, 526 p. : : ill. (some col.), digital ;; 24 cm.
Contained By:	Springer eBooks
標題:	Field ion microscopy.
標題:	Helium ions.
標題:	Ion bombardment.
標題:	Physics.
標題:	Spectroscopy and Microscopy.
標題:	Surfaces and Interfaces, Thin Films.
標題:	Surface and Interface Science, Thin Films.
標題:	Nanotechnology and Microengineering.
ISBN:	9783319419909
ISBN:	9783319419886
摘要、提要註:	This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
電子資源:	http://dx.doi.org/10.1007/978-3-319-41990-9

Helium Ion microscopy[electronic resource] /
Helium Ion microscopy[electronic resource] /edited by Gregor Hlawacek, Armin Golzhauser. - Cham :Springer International Publishing :2016. - xxiii, 526 p. :ill. (some col.), digital ;24 cm. - NanoScience and technology,1434-4904. - NanoScience and technology..

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

ISBN: 9783319419909

Standard No.: 10.1007/978-3-319-41990-9doiSubjects--Topical Terms:

672640
Field ion microscopy.

LC Class. No.: QH212.F5

Dewey Class. No.: 578.1

Helium Ion microscopy[electronic resource] /
LDR:02103nmm a2200325 a 4500 001 467411
003 DE-He213
005 20161004060720.0
006 m d
007 cr nn 008maaau
008 170511s2016 gw s 0 eng d
020 $a 9783319419909 $q (electronic bk.)
020 $a 9783319419886 $q (paper)
024 7 $a 10.1007/978-3-319-41990-9 $2 doi
035 $a 978-3-319-41990-9
040 $a GP $c GP
041 0 $a eng
050 4 $a QH212.F5
072 7 $a PNFS $2 bicssc
072 7 $a PDND $2 bicssc
072 7 $a SCI078000 $2 bisacsh
082 0 4 $a 578.1 $2 23
090 $a QH212.F5 $b H475 2016
245 0 0 $a Helium Ion microscopy $h [electronic resource] / $c edited by Gregor Hlawacek, Armin Golzhauser.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2016.
300 $a xxiii, 526 p. : $b ill. (some col.), digital ; $c 24 cm.
490 1 $a NanoScience and technology, $x 1434-4904
520 $a This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
650 0 $a Field ion microscopy. $3 672640
650 0 $a Helium ions. $3 672641
650 0 $a Ion bombardment. $3 466538
650 1 4 $a Physics. $3 171863
650 2 4 $a Spectroscopy and Microscopy. $3 463786
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 464519
650 2 4 $a Surface and Interface Science, Thin Films. $3 463790
650 2 4 $a Nanotechnology and Microengineering. $3 463475
700 1 $a Hlawacek, Gregor. $3 672638
700 1 $a Golzhauser, Armin. $3 672639
710 2 $a SpringerLink (Online service) $3 463450
773 0 $t Springer eBooks
830 0 $a NanoScience and technology. $3 466799
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-41990-9
950 $a Chemistry and Materials Science (Springer-11644)