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Resolution enhancement techniques in...

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Wong, Alfred Kwok-Kit.

Resolution enhancement techniques in optical lithography /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.3815/31
書名/作者:	Resolution enhancement techniques in optical lithography // Alfred Kwok-Kit Wong.
作者:	Wong, Alfred Kwok-Kit.
出版者:	Bellingham, Wash. : : SPIE Press,, c2001.
面頁冊數:	xvii, 214 p. : : ill. ;; 26 cm.
標題:	Microlithography.
標題:	Integrated circuits - Design and construction.
ISBN:	9780819439956 (pbk.) :
書目註:	Includes bibliographical references (p. 189-208) and index.

Resolution enhancement techniques in optical lithography /
Wong, Alfred Kwok-Kit.

Resolution enhancement techniques in optical lithography /Alfred Kwok-Kit Wong. - Bellingham, Wash. :SPIE Press,c2001. - xvii, 214 p. :ill. ;26 cm. - Tutorial texts in optical engineering ;v. TT 47.

Includes bibliographical references (p. 189-208) and index.

ISBN: 9780819439956 (pbk.) :NTD 1,856

LCCN: 2001020028Subjects--Topical Terms:

597761
Microlithography.

LC Class. No.: TK7874 / .W647 2001

Dewey Class. No.: 621.3815/31

Resolution enhancement techniques in optical lithography /
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020 $a 9780819439956 (pbk.) : $c NTD 1,856
040 $a DLC $c DLC $d DLC $d DYU
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050 0 0 $a TK7874 $b .W647 2001
082 0 0 $a 621.3815/31 $2 21
100 1 $a Wong, Alfred Kwok-Kit. $3 668082
245 1 0 $a Resolution enhancement techniques in optical lithography / $c Alfred Kwok-Kit Wong.
260 $a Bellingham, Wash. : $b SPIE Press, $c c2001.
300 $a xvii, 214 p. : $b ill. ; $c 26 cm.
490 0 $a Tutorial texts in optical engineering ; $v v. TT 47
504 $a Includes bibliographical references (p. 189-208) and index.
650 0 $a Microlithography. $3 597761
650 0 $a Integrated circuits $x Design and construction. $3 343137

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