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Nano-lithography[electronic resource] /

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Landis, Stefan.

Nano-lithography[electronic resource] /

紀錄類型:	書目-電子資源 : Monograph/item
杜威分類號:	621.381531
書名/作者:	Nano-lithography/ edited by Stefan Landis.
其他作者:	Landis, Stefan.
出版者:	London : : John Wiley and Sons,, 2011.
面頁冊數:	1 online resource (353 p.)
標題:	Nanolithography.
ISBN:	9781118622582 (electronic bk.)
ISBN:	1118622588 (electronic bk.)
ISBN:	9781118621622 (electronic bk.)
ISBN:	111862162X (electronic bk.)
書目註:	Includes bibliographical references and index.
電子資源:	http://onlinelibrary.wiley.com/book/10.1002/9781118622582

Nano-lithography[electronic resource] /
Nano-lithography[electronic resource] /edited by Stefan Landis. - 1st ed. - London :John Wiley and Sons,2011. - 1 online resource (353 p.) - ISTE. - ISTE..

Includes bibliographical references and index.

ISBN: 9781118622582 (electronic bk.)Subjects--Topical Terms:

659322
Nanolithography.

LC Class. No.: TK7872.M3 / N3613 2011

Dewey Class. No.: 621.381531

Nano-lithography[electronic resource] /
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245 0 0 $a Nano-lithography $h [electronic resource] / $c edited by Stefan Landis.
250 $a 1st ed.
260 $a London : $b John Wiley and Sons, $c 2011.
300 $a 1 online resource (353 p.)
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