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Resonant MEMS[electronic resource] :...

Brand, Oliver.

Resonant MEMS[electronic resource] :fundamentals, implementation and application /

紀錄類型:	書目-電子資源 : Monograph/item
杜威分類號:	621.381
書名/作者:	Resonant MEMS : fundamentals, implementation and application // edited by Oliver Brand ... [et al.].
其他作者:	Brand, Oliver.
出版者:	Wiesbaden : : John Wiley and Sons,, c2015.
面頁冊數:	1 online resource : : ill.
標題:	Microelectromechanical systems - Design and construction.
標題:	Microfabrication.
標題:	Resonance.
ISBN:	9783527676330 (electronic bk.)
ISBN:	9783527676361 (electronic bk.)
ISBN:	3527676368 (electronic bk.)
ISBN:	9783527676354 (electronic bk.)
ISBN:	352767635X (electronic bk.)
ISBN:	9783527676347 (electronic bk.)
ISBN:	3527676341 (electronic bk.)
ISBN:	3527676333 (electronic bk.)
書目註:	Includes bibliographical references and index.
電子資源:	http://onlinelibrary.wiley.com/book/10.1002/9783527676330

Resonant MEMS[electronic resource] :fundamentals, implementation and application /
Resonant MEMSfundamentals, implementation and application /[electronic resource] :edited by Oliver Brand ... [et al.]. - 1st ed. - Wiesbaden :John Wiley and Sons,c2015. - 1 online resource :ill. - Advanced micro and nanosystems. - Advanced micro & nanosystems..

Includes bibliographical references and index.

ISBN: 9783527676330 (electronic bk.)Subjects--Topical Terms:

344152
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Resonant MEMS[electronic resource] :fundamentals, implementation and application /
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300 $a 1 online resource : $b ill.
490 1 $a Advanced micro and nanosystems
504 $a Includes bibliographical references and index.
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650 0 $a Microfabrication. $3 344153
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