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Nanolithography[electronic resource]...

Feldman, Martin,

Nanolithography[electronic resource] :the art of fabricating nanoelectronic and nanophotonic devices and systems /

紀錄類型:	書目-電子資源 : Monograph/item
杜威分類號:	621.381531
書名/作者:	Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems // edited by Martin Feldman.
其他作者:	Feldman, Martin,
出版者:	Oxford : : Woodhead Publishing,, 2014.
面頁冊數:	1 online resource (xxiv, 573 p.) : : ill.
標題:	Nanolithography.
ISBN:	9780857095008 (electronic bk.)
書目註:	Includes bibliographical references and index.
電子資源:	click for full text

Nanolithography[electronic resource] :the art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /[electronic resource] :edited by Martin Feldman. - Oxford :Woodhead Publishing,2014. - 1 online resource (xxiv, 573 p.) :ill. - Woodhead Publishing series in electronic and optical materials ;no. 42. - Woodhead Publishing series in electronic and optical materials ;no. 41..

Includes bibliographical references and index.

ISBN: 9780857095008 (electronic bk.)Subjects--Topical Terms:

659322
Nanolithography.

LC Class. No.: TK7874.843 / .N368 2014

Dewey Class. No.: 621.381531

Nanolithography[electronic resource] :the art of fabricating nanoelectronic and nanophotonic devices and systems /
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