Handbook of thin film technology[ele...
Frey, Hartmut.

 

  • Handbook of thin film technology[electronic resource] /
  • 紀錄類型: 書目-電子資源 : Monograph/item
    杜威分類號: 621.38152
    書名/作者: Handbook of thin film technology/ edited by Hartmut Frey, Hamid R. Khan.
    其他作者: Frey, Hartmut.
    出版者: Berlin, Heidelberg : : Springer Berlin Heidelberg :, 2015.
    面頁冊數: xiii, 379 p. : : ill., digital ;; 24 cm.
    Contained By: Springer eBooks
    標題: Thin films
    標題: Materials Science.
    標題: Surfaces and Interfaces, Thin Films.
    標題: Characterization and Evaluation of Materials.
    標題: Nanotechnology.
    標題: Tribology, Corrosion and Coatings.
    標題: Physical Chemistry.
    標題: Optical and Electronic Materials.
    ISBN: 9783642054303 (electronic bk.)
    ISBN: 9783642054297 (paper)
    內容註: Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
    摘要、提要註: "Handbook of Thin Film Technology" covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
    電子資源: http://dx.doi.org/10.1007/978-3-642-05430-3
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