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Principles of lithography /

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Levinson, Harry J.

Principles of lithography /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.3815/31
書名/作者:	Principles of lithography // Harry J. Levinson.
作者:	Levinson, Harry J.
出版者:	Bellingham, Wash. : : SPIE Press,, c2010.
面頁冊數:	xiv, 504 p., [4] p. of plates : : ill. (some col.) ;; 26 cm.
標題:	Integrated circuits - Design and construction.
標題:	Microlithography.
ISBN:	9780819483249 (hbk.) :
ISBN:	0819483249 (hbk.)
書目註:	Includes bibliographical references and index.

Principles of lithography /
Levinson, Harry J.

Principles of lithography /Harry J. Levinson. - 3rd ed. - Bellingham, Wash. :SPIE Press,c2010. - xiv, 504 p., [4] p. of plates :ill. (some col.) ;26 cm.

Includes bibliographical references and index.

ISBN: 9780819483249 (hbk.) :NTD 3,223

LCCN: 2010026775Subjects--Topical Terms:

343137
Integrated circuits
--Design and construction.

LC Class. No.: TK7874 / .L397 2010

Dewey Class. No.: 621.3815/31

Principles of lithography /
LDR:00614cam a2200193 a 4500 001 421931
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010 $a 2010026775
020 $a 9780819483249 (hbk.) : $c NTD 3,223
020 $a 0819483249 (hbk.)
040 $a DLC $c DLC $d DLC $d DYU
041 0 $a eng
050 0 0 $a TK7874 $b .L397 2010
082 0 0 $a 621.3815/31 $2 22
100 1 $a Levinson, Harry J. $3 598060
245 1 0 $a Principles of lithography / $c Harry J. Levinson.
250 $a 3rd ed.
260 $a Bellingham, Wash. : $b SPIE Press, $c c2010.
300 $a xiv, 504 p., [4] p. of plates : $b ill. (some col.) ; $c 26 cm.
504 $a Includes bibliographical references and index.
650 0 $a Integrated circuits $x Design and construction. $3 343137
650 0 $a Microlithography. $3 597761

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