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Introduction to semiconductor manufa...
~
Xiao, Hong.
Introduction to semiconductor manufacturing technology /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
杜威分類號:
621.3815/2
書名/作者:
Introduction to semiconductor manufacturing technology // Hong Xiao.
作者:
Xiao, Hong.
出版者:
Bellingham, Wash. : : SPIE,, c2012.
面頁冊數:
xxx, 664 p. : : ill. ;; 26 cm.
標題:
Semiconductors - Design and construction.
標題:
Semiconductor industry.
ISBN:
9780819490926 (hbk.) :
ISBN:
081949092X (hbk.)
書目註:
Includes bibliographical references and index.
內容註:
Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index.
Introduction to semiconductor manufacturing technology /
Xiao, Hong.
Introduction to semiconductor manufacturing technology /
Hong Xiao. - 2nd ed. - Bellingham, Wash. :SPIE,c2012. - xxx, 664 p. :ill. ;26 cm.
Includes bibliographical references and index.
Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index.
ISBN: 9780819490926 (hbk.) :NTD 4,076
LCCN: 2012013231Subjects--Topical Terms:
418296
Semiconductors
--Design and construction.
LC Class. No.: TK7871.85 / .X53 2012
Dewey Class. No.: 621.3815/2
Introduction to semiconductor manufacturing technology /
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