New approaches to image processing b...
Gur, Eran.

 

  • New approaches to image processing based failure analysis of nano-scale ULSI devices[electronic resource] /
  • 紀錄類型: 書目-語言資料,印刷品 : Monograph/item
    杜威分類號: 621.4
    書名/作者: New approaches to image processing based failure analysis of nano-scale ULSI devices/ Zeev Zalevsky, Pavel Livshits, Eran Gur.
    作者: Zalevsky, Zeev.
    其他作者: Livshits, Pavel.
    出版者: Amsterdam : : Elsevier/William Andrew,, 2014.
    面頁冊數: 101 p. : : ill. ;; 23 cm.
    標題: Integrated circuits - Ultra large scale integration
    標題: Nanoelectronics.
    標題: Microelectronics.
    ISBN: 9780323241434 (electronic bk.)
    ISBN: 9780323241434
    書目註: Includes bibliographical references.
    摘要、提要註: New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
    電子資源: http://www.sciencedirect.com/science/book/9780323241434
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