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Sputtering materials for VLSI and th...
~
Sarkar, Jaydeep, ((Materials scientist))
Sputtering materials for VLSI and thin film devices[electronic resource] /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
杜威分類號:
621.381
書名/作者:
Sputtering materials for VLSI and thin film devices/ by Jaydeep Sarkar.
作者:
Sarkar, Jaydeep,
出版者:
Norwich, N.Y. : : William Andrew ;, 2011.
面頁冊數:
x, 603 p. : : ill. ;; 25 cm.
標題:
Microelectronics - Materials.
標題:
Flat panel displays - Materials.
標題:
Sputtering (Physics)
ISBN:
9780815515937 (electronic bk.)
ISBN:
9780815515937
書目註:
Includes bibliographical references and index.
電子資源:
http://www.sciencedirect.com/science/book/9780815515937
Sputtering materials for VLSI and thin film devices[electronic resource] /
Sarkar, Jaydeep,(Materials scientist)
Sputtering materials for VLSI and thin film devices
[electronic resource] /by Jaydeep Sarkar. - Norwich, N.Y. :William Andrew ;2011. - x, 603 p. :ill. ;25 cm.
Includes bibliographical references and index.
ISBN: 9780815515937 (electronic bk.)Subjects--Topical Terms:
466004
Microelectronics
--Materials.
LC Class. No.: TK7874 / .S273 2014
Dewey Class. No.: 621.381
Sputtering materials for VLSI and thin film devices[electronic resource] /
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http://www.sciencedirect.com/science/book/9780815515937
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