大葉大學圖書館 |

Analysis and design principles of MEMS devices[electronic resource] /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.381
書名/作者:	Analysis and design principles of MEMS devices/ by Minhang Bao.
作者:	Bao, Min-Hang.
出版者:	Amsterdam ; : Elsevier,, 2005.
面頁冊數:	xii, 312 p. : : ill. ;; 25 cm.
標題:	Microelectromechanical systems.
ISBN:	9780444516169
ISBN:	0444516166
書目註:	Includes bibliographical references and index.
內容註:	Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing.
摘要、提要註:	Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
電子資源:	An electronic book accessible through the World Wide Web; click for information
電子資源:	An electronic book accessible through the World Wide Web; click for information

Analysis and design principles of MEMS devices[electronic resource] /
Bao, Min-Hang.

Analysis and design principles of MEMS devices[electronic resource] /by Minhang Bao. - Amsterdam ;Elsevier,2005. - xii, 312 p. :ill. ;25 cm.

Includes bibliographical references and index.

Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing.

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Electronic reproduction.
Amsterdam :
Elsevier Science & Technology,
2007.

Mode of access: World Wide Web.

ISBN: 9780444516169

Source: 104495:104517Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

343612
Microelectromechanical systems.
Index Terms--Genre/Form:

336502
Electronic books.

LC Class. No.: TK7875 / .B36 2005eb

Dewey Class. No.: 621.381

Analysis and design principles of MEMS devices[electronic resource] /
LDR:03299nam 2200361Ia 4500 001 341458
003 OCoLC
005 20090612093507.0
006 m d
007 cr cn|||||||||
008 110627s2005 ne a sb 001 0 eng d
020 $a 9780444516169
020 $a 0444516166
029 1 $a NZ1 $b 12434363
035 $a (OCoLC)162130017
035 $a ocn162130017
037 $a 104495:104517 $b Elsevier Science & Technology $n http://www.sciencedirect.com
040 $a OPELS $c OPELS $d BAKER
049 $a TEFA
050 1 4 $a TK7875 $b .B36 2005eb
072 7 $a TK $2 lcco
082 0 4 $a 621.381 $2 22
100 1 $a Bao, Min-Hang. $3 416288
245 1 0 $a Analysis and design principles of MEMS devices $h [electronic resource] / $c by Minhang Bao.
260 $a Amsterdam ; $a Boston ; $a London : $b Elsevier, $c 2005.
300 $a xii, 312 p. : $b ill. ; $c 25 cm.
504 $a Includes bibliographical references and index.
505 0 $a Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing.
520 $a Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
533 $a Electronic reproduction. $b Amsterdam : $c Elsevier Science & Technology, $d 2007. $n Mode of access: World Wide Web. $n System requirements: Web browser. $n Title from title screen (viewed on July 25, 2007). $n Access may be restricted to users at subscribing institutions.
650 0 $a Microelectromechanical systems. $3 343612
655 7 $a Electronic books. $2 local $3 336502
710 2 $a ScienceDirect (Online service) $3 365609
776 1 $c Original $z 0444516166 $z 9780444516169 $w (OCoLC)57750897
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780444516169 $z An electronic book accessible through the World Wide Web; click for information
856 4 0 $3 Referex $u http://www.engineeringvillage.com/controller/servlet/OpenURL?genre=book&isbn=9780444516169 $z An electronic book accessible through the World Wide Web; click for information
938 $a Baker & Taylor $b BKTY $c 101.00 $d 101.00 $i 0444516166 $n 0006291862 $s active
994 $a C0 $b TEF