ULSI front-end technology[electronic...
Lau, W. S.

 

  • ULSI front-end technology[electronic resource] :covering from the first semiconductor paper to CMOS FINFET technology /
  • 紀錄類型: 書目-電子資源 : Monograph/item
    杜威分類號: 621.395
    書名/作者: ULSI front-end technology : covering from the first semiconductor paper to CMOS FINFET technology // W S Lau.
    作者: Lau, W. S.
    出版者: Singapore : : World Scientific,, c2018.
    面頁冊數: 1 online resource (247 p.) : : ill. (some col.)
    附註: Title from PDF title page (viewed September 7, 2017)
    標題: Integrated circuits - Ultra large scale integration.
    標題: Metal oxide semiconductors, Complementary.
    標題: Semiconductors - History.
    標題: Electronic books.
    ISBN: 9789813222168
    書目註: Includes bibliographical references and index.
    摘要、提要註: "The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book."--Publisher's website.
    電子資源: http://www.worldscientific.com/worldscibooks/10.1142/10495#t=toc
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