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Nanofabrication[electronic resource] :principles and applications /

纪录类型:	书目-电子资源 : Monograph/item
[NT 15000414] null:	621.381
[NT 47271] Title/Author:	Nanofabrication : principles and applications // by Christo Papadopoulos.
作者:	Papadopoulos, Christo.
出版者:	Cham : : Springer International Publishing :, 2016.
面页册数:	vi, 81 p. : : ill. (some col.), digital ;; 24 cm.
Contained By:	Springer eBooks
标题:	Nanolithography.
标题:	Materials Science.
标题:	Nanotechnology.
标题:	Electronics and Microelectronics, Instrumentation.
标题:	Semiconductors.
标题:	Nanoscale Science and Technology.
ISBN:	9783319317427
ISBN:	9783319317403
[NT 15000228] null:	Introduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.
[NT 15000229] null:	This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
电子资源:	http://dx.doi.org/10.1007/978-3-319-31742-7

Nanofabrication[electronic resource] :principles and applications /
Papadopoulos, Christo.

Nanofabricationprinciples and applications /[electronic resource] :by Christo Papadopoulos. - Cham :Springer International Publishing :2016. - vi, 81 p. :ill. (some col.), digital ;24 cm. - SpringerBriefs in materials,2192-1091. - SpringerBriefs in materials..

Introduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

ISBN: 9783319317427

Standard No.: 10.1007/978-3-319-31742-7doiSubjects--Topical Terms:

659322
Nanolithography.

LC Class. No.: TA7874.84 / .P37 2016

Dewey Class. No.: 621.381

Nanofabrication[electronic resource] :principles and applications /
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