Nanofabrication[electronic resource]...
Papadopoulos, Christo.

 

  • Nanofabrication[electronic resource] :principles and applications /
  • 紀錄類型: 書目-電子資源 : Monograph/item
    杜威分類號: 621.381
    書名/作者: Nanofabrication : principles and applications // by Christo Papadopoulos.
    作者: Papadopoulos, Christo.
    出版者: Cham : : Springer International Publishing :, 2016.
    面頁冊數: vi, 81 p. : : ill. (some col.), digital ;; 24 cm.
    Contained By: Springer eBooks
    標題: Nanolithography.
    標題: Materials Science.
    標題: Nanotechnology.
    標題: Electronics and Microelectronics, Instrumentation.
    標題: Semiconductors.
    標題: Nanoscale Science and Technology.
    ISBN: 9783319317427
    ISBN: 9783319317403
    內容註: Introduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.
    摘要、提要註: This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
    電子資源: http://dx.doi.org/10.1007/978-3-319-31742-7
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