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Resonant MEMS[electronic resource] :...

Brand, Oliver.

Resonant MEMS[electronic resource] :fundamentals, implementation and application /

Record Type:	Electronic resources : Monograph/item
[NT 15000414]:	621.381
Title/Author:	Resonant MEMS : fundamentals, implementation and application // edited by Oliver Brand ... [et al.].
other author:	Brand, Oliver.
Published:	Wiesbaden : : John Wiley and Sons,, c2015.
Description:	1 online resource : : ill.
Subject:	Microelectromechanical systems - Design and construction.
Subject:	Microfabrication.
Subject:	Resonance.
ISBN:	9783527676330 (electronic bk.)
ISBN:	9783527676361 (electronic bk.)
ISBN:	3527676368 (electronic bk.)
ISBN:	9783527676354 (electronic bk.)
ISBN:	352767635X (electronic bk.)
ISBN:	9783527676347 (electronic bk.)
ISBN:	3527676341 (electronic bk.)
ISBN:	3527676333 (electronic bk.)
[NT 15000227]:	Includes bibliographical references and index.
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9783527676330

Resonant MEMS[electronic resource] :fundamentals, implementation and application /
Resonant MEMSfundamentals, implementation and application /[electronic resource] :edited by Oliver Brand ... [et al.]. - 1st ed. - Wiesbaden :John Wiley and Sons,c2015. - 1 online resource :ill. - Advanced micro and nanosystems. - Advanced micro & nanosystems..

Includes bibliographical references and index.

ISBN: 9783527676330 (electronic bk.)Subjects--Topical Terms:

344152
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Resonant MEMS[electronic resource] :fundamentals, implementation and application /
LDR:01303cmm a2200349Ia 4500 001 460869
005 20150928151401.0
006 m o d
007 cr cnu---unuuu
008 170223s2015 gw a ob 001 0 eng d
020 $a 9783527676330 (electronic bk.)
020 $a 9783527676361 (electronic bk.)
020 $a 3527676368 (electronic bk.)
020 $a 9783527676354 (electronic bk.)
020 $a 352767635X (electronic bk.)
020 $a 9783527676347 (electronic bk.)
020 $a 3527676341 (electronic bk.)
020 $a 3527676333 (electronic bk.)
020 $z 9783527335459
035 $a 002346532
040 $a N $b eng $c N $d IDEBK $d CDX $d N $d YDXCP $d RECBK $d E7B $d DG1 $d OCLCF
041 0 $a eng
050 4 $a TK7875
082 0 4 $a 621.381 $2 23
245 0 0 $a Resonant MEMS $h [electronic resource] : $b fundamentals, implementation and application / $c edited by Oliver Brand ... [et al.].
250 $a 1st ed.
260 $a Wiesbaden : $b John Wiley and Sons, $c c2015.
300 $a 1 online resource : $b ill.
490 1 $a Advanced micro and nanosystems
504 $a Includes bibliographical references and index.
588 0 $a Online resource; title from PDF title page (Ebsco, viewed May 11, 2015)
588 $a Description based on print version record.
650 0 $a Microelectromechanical systems $x Design and construction. $3 344152
650 0 $a Microfabrication. $3 344153
650 0 $a Resonance. $3 344154
700 1 $a Brand, Oliver. $3 664196
830 0 $a Advanced micro & nanosystems. $3 623569
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9783527676330

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