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Micro/nano integrated fabrication te...

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Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	620.5
書名/作者:	Micro/nano integrated fabrication technology and its applications in microenergy harvesting/ by Xiao-Sheng Zhang.
作者:	Zhang, Xiao-Sheng.
出版者:	Berlin, Heidelberg : : Springer Berlin Heidelberg :, 2016.
面頁冊數:	xx, 122 p. : : ill., digital ;; 24 cm.
Contained By:	Springer eBooks
標題:	Nanotechnology.
標題:	Nanostructures.
標題:	Biomimetic materials.
標題:	Engineering.
標題:	Nanotechnology and Microengineering.
標題:	Microengineering.
標題:	Energy Harvesting.
標題:	Electronics and Microelectronics, Instrumentation.
ISBN:	9783662488164
ISBN:	9783662488140
摘要、提要註:	This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
電子資源:	http://dx.doi.org/10.1007/978-3-662-48816-4

Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /
Zhang, Xiao-Sheng.

Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /by Xiao-Sheng Zhang. - Berlin, Heidelberg :Springer Berlin Heidelberg :2016. - xx, 122 p. :ill., digital ;24 cm. - Springer theses,2190-5053. - Springer theses..

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

ISBN: 9783662488164

Standard No.: 10.1007/978-3-662-48816-4doiSubjects--Topical Terms:

192698
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /
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520 $a This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
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