Micro/nano integrated fabrication te...
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  • Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /
  • 紀錄類型: 書目-語言資料,印刷品 : Monograph/item
    杜威分類號: 620.5
    書名/作者: Micro/nano integrated fabrication technology and its applications in microenergy harvesting/ by Xiao-Sheng Zhang.
    作者: Zhang, Xiao-Sheng.
    出版者: Berlin, Heidelberg : : Springer Berlin Heidelberg :, 2016.
    面頁冊數: xx, 122 p. : : ill., digital ;; 24 cm.
    Contained By: Springer eBooks
    標題: Nanotechnology.
    標題: Nanostructures.
    標題: Biomimetic materials.
    標題: Engineering.
    標題: Nanotechnology and Microengineering.
    標題: Microengineering.
    標題: Energy Harvesting.
    標題: Electronics and Microelectronics, Instrumentation.
    ISBN: 9783662488164
    ISBN: 9783662488140
    摘要、提要註: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
    電子資源: http://dx.doi.org/10.1007/978-3-662-48816-4
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