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Nanopositioning technologies[electronic resource] :fundamentals and applications /

Record Type:	Language materials, printed : Monograph/item
[NT 15000414]:	620.5
Title/Author:	Nanopositioning technologies : fundamentals and applications // edited by Changhai Ru, Xinyu Liu, Yu Sun.
other author:	Ru, Changhai.
Published:	Cham : : Springer International Publishing :, 2016.
Description:	vi, 409 p. : : ill., digital ;; 24 cm.
Contained By:	Springer eBooks
Subject:	Nanoelectromechanical systems.
Subject:	Engineering.
Subject:	Nanotechnology and Microengineering.
Subject:	Electronics and Microelectronics, Instrumentation.
Subject:	Control, Robotics, Mechatronics.
Subject:	Engineering Design.
ISBN:	9783319238531
ISBN:	9783319238524
[NT 15000228]:	1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
[NT 15000229]:	This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Online resource:	http://dx.doi.org/10.1007/978-3-319-23853-1

Nanopositioning technologies[electronic resource] :fundamentals and applications /
Nanopositioning technologiesfundamentals and applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - Cham :Springer International Publishing :2016. - vi, 409 p. :ill., digital ;24 cm.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

461850
Nanoelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Nanopositioning technologies[electronic resource] :fundamentals and applications /
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260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2016.
300 $a vi, 409 p. : $b ill., digital ; $c 24 cm.
505 0 $a 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
650 0 $a Nanoelectromechanical systems. $3 461850
650 1 4 $a Engineering. $3 372756
650 2 4 $a Nanotechnology and Microengineering. $3 463475
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 463474
650 2 4 $a Control, Robotics, Mechatronics. $3 463939
650 2 4 $a Engineering Design. $3 464657
700 1 $a Ru, Changhai. $3 654309
700 1 $a Liu, Xinyu. $3 344121
700 1 $a Sun, Yu. $3 654310
710 2 $a SpringerLink (Online service) $3 463450
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-23853-1
950 $a Engineering (Springer-11647)