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Nanopositioning technologies[electronic resource] :fundamentals and applications /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	620.5
書名/作者:	Nanopositioning technologies : fundamentals and applications // edited by Changhai Ru, Xinyu Liu, Yu Sun.
其他作者:	Ru, Changhai.
出版者:	Cham : : Springer International Publishing :, 2016.
面頁冊數:	vi, 409 p. : : ill., digital ;; 24 cm.
Contained By:	Springer eBooks
標題:	Nanoelectromechanical systems.
標題:	Engineering.
標題:	Nanotechnology and Microengineering.
標題:	Electronics and Microelectronics, Instrumentation.
標題:	Control, Robotics, Mechatronics.
標題:	Engineering Design.
ISBN:	9783319238531
ISBN:	9783319238524
內容註:	1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
摘要、提要註:	This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
電子資源:	http://dx.doi.org/10.1007/978-3-319-23853-1

Nanopositioning technologies[electronic resource] :fundamentals and applications /
Nanopositioning technologiesfundamentals and applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - Cham :Springer International Publishing :2016. - vi, 409 p. :ill., digital ;24 cm.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

461850
Nanoelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Nanopositioning technologies[electronic resource] :fundamentals and applications /
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520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
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