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Atomic layer deposition for semicond...
~
Seong Hwang, Cheol.
Atomic layer deposition for semiconductors[electronic resource] /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
杜威分類號:
621.38152
書名/作者:
Atomic layer deposition for semiconductors/ edited by Cheol Seong Hwang.
其他作者:
Seong Hwang, Cheol.
出版者:
Boston, MA : : Springer US :, 2014.
面頁冊數:
x, 263 p. : : ill., digital ;; 24 cm.
Contained By:
Springer eBooks
標題:
Semiconductors - Surfaces.
標題:
Chemistry.
標題:
Electrochemistry.
標題:
Semiconductors.
標題:
Memory Structures.
標題:
Energy Technology.
標題:
Electronics and Microelectronics, Instrumentation.
ISBN:
9781461480549 (electronic bk.)
ISBN:
9781461480532 (paper)
電子資源:
http://dx.doi.org/10.1007/978-1-4614-8054-9
Atomic layer deposition for semiconductors[electronic resource] /
Atomic layer deposition for semiconductors
[electronic resource] /edited by Cheol Seong Hwang. - Boston, MA :Springer US :2014. - x, 263 p. :ill., digital ;24 cm.
ISBN: 9781461480549 (electronic bk.)Subjects--Topical Terms:
611807
Semiconductors
--Surfaces.
Dewey Class. No.: 621.38152
Atomic layer deposition for semiconductors[electronic resource] /
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