Micro and nano fabrication[electroni...
Gatzen, Hans H.

 

  • Micro and nano fabrication[electronic resource] :tools and processes /
  • 紀錄類型: 書目-語言資料,印刷品 : Monograph/item
    杜威分類號: 620.5
    書名/作者: Micro and nano fabrication : tools and processes // by Hans H. Gatzen, Volker Saile, Jurg Leuthold.
    作者: Gatzen, Hans H.
    其他作者: Saile, Volker.
    出版者: Berlin, Heidelberg : : Springer Berlin Heidelberg :, 2015.
    面頁冊數: xxvi, 519 p. : : ill., digital ;; 24 cm.
    Contained By: Springer eBooks
    標題: Microelectromechanical systems.
    標題: Engineering.
    標題: Nanotechnology and Microengineering.
    標題: Manufacturing, Machines, Tools.
    標題: Operating Procedures, Materials Treatment.
    ISBN: 9783662443958 (electronic bk.)
    ISBN: 9783662443941 (paper)
    內容註: Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
    摘要、提要註: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
    電子資源: http://dx.doi.org/10.1007/978-3-662-44395-8
評論
Export
取書館別
 
 
變更密碼
登入