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Applications of plasma processes to ...
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Sugano, Takuo
Applications of plasma processes to vlsi technology
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Applications of plasma processes to vlsi technology/ Sugano, Takuo
Author:
Sugano, Takuo
Published:
New York : John Wiley & Sons, Ltd., 1985
Description:
394頁; 24x16公分
Subject:
Semiconductors-Etching
Subject:
Integrated circuits-Very...
Subject:
Plasma etching
ISBN:
0471869600(精裝)
Applications of plasma processes to vlsi technology
Sugano, Takuo
Applications of plasma processes to vlsi technology
Sugano, Takuo - New YorkJohn Wiley & Sons, Ltd.1985 - 394頁24x16公分
ISBN: 0471869600(精裝)Subjects--Topical Terms:
153780
Semiconductors-Etching
Applications of plasma processes to vlsi technology
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Integrated circuits-Very...
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Plasma etching
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149058
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