Applications of plasma processes to ...
Sugano, Takuo

 

  • Applications of plasma processes to vlsi technology
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Applications of plasma processes to vlsi technology/ Sugano, Takuo
    Author: Sugano, Takuo
    Published: New York : John Wiley & Sons, Ltd., 1985
    Description: 394頁; 24x16公分
    Subject: Semiconductors-Etching
    Subject: Integrated circuits-Very...
    Subject: Plasma etching
    ISBN: 0471869600(精裝)
Items
  • 1 records • Pages 1 •
 
801621381700089 四樓西文圖書區 1.圖書流通 圖書 621.3817 SU32 1.一般(Normal) On shelf 0
  • 1 records • Pages 1 •
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