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Resolution enhancement techniques in...
~
Wong, Alfred Kwok-Kit.
Resolution enhancement techniques in optical lithography /
纪录类型:
书目-语言数据,印刷品 : Monograph/item
[NT 15000414] null:
621.3815/31
[NT 47271] Title/Author:
Resolution enhancement techniques in optical lithography // Alfred Kwok-Kit Wong.
作者:
Wong, Alfred Kwok-Kit.
出版者:
Bellingham, Wash. : : SPIE Press,, c2001.
面页册数:
xvii, 214 p. : : ill. ;; 26 cm.
标题:
Microlithography.
标题:
Integrated circuits - Design and construction.
ISBN:
9780819439956 (pbk.) :
[NT 15000227] null:
Includes bibliographical references (p. 189-208) and index.
Resolution enhancement techniques in optical lithography /
Wong, Alfred Kwok-Kit.
Resolution enhancement techniques in optical lithography /
Alfred Kwok-Kit Wong. - Bellingham, Wash. :SPIE Press,c2001. - xvii, 214 p. :ill. ;26 cm. - Tutorial texts in optical engineering ;v. TT 47.
Includes bibliographical references (p. 189-208) and index.
ISBN: 9780819439956 (pbk.) :NTD 1,856
LCCN: 2001020028Subjects--Topical Terms:
597761
Microlithography.
LC Class. No.: TK7874 / .W647 2001
Dewey Class. No.: 621.3815/31
Resolution enhancement techniques in optical lithography /
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