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System-level modeling of MEMS[electr...

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Bechtold, T.

System-level modeling of MEMS[electronic resource] /

纪录类型:	书目-电子资源 : Monograph/item
[NT 15000414] null:	621.381
[NT 47271] Title/Author:	System-level modeling of MEMS/ edited by Tamara Bechtold, Gabriele Schrag, Lihong Feng.
[NT 51406] other author:	Bechtold, T.
出版者:	Weinheim : : John Wiley and Sons,, c2013.
面页册数:	1 online resource.
标题:	Microelectromechanical systems - Simulation methods.
ISBN:	9783527647132 (electronic bk.)
ISBN:	3527647139 (electronic bk.)
[NT 15000227] null:	Includes bibliographical references and index.
电子资源:	http://onlinelibrary.wiley.com/book/10.1002/9783527647132

System-level modeling of MEMS[electronic resource] /
System-level modeling of MEMS[electronic resource] /edited by Tamara Bechtold, Gabriele Schrag, Lihong Feng. - 1st ed. - Weinheim :John Wiley and Sons,c2013. - 1 online resource.

Includes bibliographical references and index.

ISBN: 9783527647132 (electronic bk.)Subjects--Topical Terms:

490052
Microelectromechanical systems
--Simulation methods.

LC Class. No.: TK7875 / .S97 2013

Dewey Class. No.: 621.381

System-level modeling of MEMS[electronic resource] /
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020 $a 3527647139 (electronic bk.)
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082 0 4 $a 621.381 $2 23
245 0 0 $a System-level modeling of MEMS $h [electronic resource] / $c edited by Tamara Bechtold, Gabriele Schrag, Lihong Feng.
250 $a 1st ed.
260 $a Weinheim : $b John Wiley and Sons, $c c2013.
300 $a 1 online resource.
504 $a Includes bibliographical references and index.
588 $a Description based on print version record.
650 0 $a Microelectromechanical systems $x Simulation methods. $3 490052
700 1 $a Bechtold, T. $q (Tamara) $3 664404
700 1 $a Schrag, Gabriele. $3 664405
700 1 $a Feng, Lihong. $3 664406
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9783527647132

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