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Handbook of thin film deposition[ele...

Seshan, Krishna.

Handbook of thin film deposition[electronic resource] :techniques, processes, and technologies /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.38152
書名/作者:	Handbook of thin film deposition : techniques, processes, and technologies // edited by Krishna Seshan.
其他作者:	Seshan, Krishna.
出版者:	Amsterdam ; : Elsevier ;, 2012.
面頁冊數:	xviii, 392 p. : : ill. ;; 24 cm.
標題:	Thin films.
標題:	Thin film devices - Design and construction.
ISBN:	9781437778731 (electronic bk.)
ISBN:	9781437778731
書目註:	Includes bibliographical references and index.
電子資源:	http://www.sciencedirect.com/science/book/9781437778731

Handbook of thin film deposition[electronic resource] :techniques, processes, and technologies /
Handbook of thin film depositiontechniques, processes, and technologies /[electronic resource] :edited by Krishna Seshan. - 3rd ed. - Amsterdam ;Elsevier ;2012. - xviii, 392 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9781437778731 (electronic bk.)

LCCN: 2012472459Subjects--Topical Terms:

183807
Thin films.

LC Class. No.: TK7872.T55 / H36 2012

Dewey Class. No.: 621.38152

Handbook of thin film deposition[electronic resource] :techniques, processes, and technologies /
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