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Materials science in microelectronics /

~

Machlin, E. S.

Materials science in microelectronics /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.3815/2
書名/作者:	Materials science in microelectronics // E.S. Machlin.
作者:	Machlin, E. S.
出版者:	Amsterdam ; : Elsevier,, 2005-2006.
面頁冊數:	2 v. : : ill. ;; 24 cm.
標題:	Thin films.
標題:	Microelectronics.
ISBN:	9780080446400 (hbk. : v. 1) :
ISBN:	008044640X (hbk. : v. 1)
書目註:	Includes bibliographical references and indexes.
內容註:	v. 1. The relationships between thin film processing and structure -- v. 2. The effects.
電子資源:	http://www.loc.gov/catdir/enhancements/fy0629/2005934958-d.html

Materials science in microelectronics /
Machlin, E. S.

Materials science in microelectronics /E.S. Machlin. - 2nd ed. - Amsterdam ;Elsevier,2005-2006. - 2 v. :ill. ;24 cm.

Includes bibliographical references and indexes.

v. 1. The relationships between thin film processing and structure -- v. 2. The effects.

ISBN: 9780080446400 (hbk. : v. 1) :NTD 7,200

LCCN: 2005934958Subjects--Topical Terms:

183807
Thin films.

LC Class. No.: TK7871.15.F5 / M32 2005

Dewey Class. No.: 621.3815/2

Materials science in microelectronics /
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010 $a 2005934958
020 $a 9780080446400 (hbk. : v. 1) : $c NTD 7,200
020 $a 008044640X (hbk. : v. 1)
040 $a DLC $c DLC $d DLC $d DYU
041 0 $a eng
050 0 0 $a TK7871.15.F5 $b M32 2005
082 0 4 $a 621.3815/2 $2 22
100 1 $a Machlin, E. S. $3 403665
245 1 0 $a Materials science in microelectronics / $c E.S. Machlin.
250 $a 2nd ed.
260 $a Amsterdam ; $a Boston : $b Elsevier, $c 2005-2006.
300 $a 2 v. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and indexes.
505 0 $a v. 1. The relationships between thin film processing and structure -- v. 2. The effects.
650 0 $a Thin films. $3 183807
650 0 $a Microelectronics. $3 183856
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0629/2005934958-d.html

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