Principles of physical vapor deposit...
SreeHarsha, K. S.

 

  • Principles of physical vapor deposition of thin films[electronic resource] /
  • 紀錄類型: 書目-語言資料,印刷品 : Monograph/item
    杜威分類號: 621.38152
    書名/作者: Principles of physical vapor deposition of thin films/ K.S. Sree Harsha.
    作者: SreeHarsha, K. S.
    出版者: Amsterdam ; : Elsevier,, 2006.
    面頁冊數: 1 online resource (xi, 1160 p.) : : ill.
    標題: Thin films.
    標題: Vapor-plating.
    標題: Couches minces.
    標題: D�ep�ot en phase vapeur.
    ISBN: 9780080446998
    ISBN: 008044699X
    書目註: Includes bibliographical references and index.
    摘要、提要註: The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.
    電子資源: http://www.sciencedirect.com/science/book/9780080446998
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