Biological and physical-chemical met...
Gamez Grijalva, Victor Manuel.

 

  • Biological and physical-chemical methods for treatment of semiconductor manufacturing effluents.
  • 紀錄類型: 書目-語言資料,印刷品 : Monograph/item
    書名/作者: Biological and physical-chemical methods for treatment of semiconductor manufacturing effluents.
    作者: Gamez Grijalva, Victor Manuel.
    面頁冊數: 343 p.
    附註: Source: Dissertation Abstracts International, Volume: 70-05, Section: B, page: 3106.
    Contained By: Dissertation Abstracts International70-05B.
    標題: Biology, Microbiology.
    標題: Environmental Sciences.
    標題: Engineering, Environmental.
    ISBN: 9781109167412
    摘要、提要註: Semiconductor manufacturing is one of the most advancing, growing and evolving industries. The production of semiconductors presents several challenges, both technologically and environmentally. The amount and complexity of the chemical substances utilized in the manufacturing process has been growing exponentially, and new chemicals are often introduced to the process and the environment. Two steps of this process play a special important role in the introduction of new chemical and demand of natural resources: Chemical Mechanical Planarization (CMP) and Photolithography. Wastewaters from the semiconductor manufacturing are complex and have several chemicals in different concentrations. Heavy metals, acids, chelators, surfactants and other chemicals are found in semiconductor effluents. Part of the scope of this study is to evaluate and remediate wastewaters produced in semiconductor manufacturing.
    電子資源: http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3356417
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