Thin Film Materials :[electronic res...
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  • Thin Film Materials :[electronic resource].Stress, Defect Formation and Surface Evolution.
  • 紀錄類型: 書目-語言資料,印刷品 : Monograph/item
    杜威分類號: 621.38152
    書名/作者: Thin Film Materials : : Stress, Defect Formation and Surface Evolution.
    作者: Freund, L. B.
    其他作者: Suresh, S.
    出版者: Cambridge : : Cambridge University Press,, 2004.
    面頁冊數: 770 p.
    標題: Thin films.
    ISBN: 9780511754715 (electronic bk.)
    ISBN: 9780521822817 (print)
    內容註: Cover; Half-title; Title; Copyright; Dedication; Contents; Preface; 1 Introduction and Overview; 2 Film stress and substrate curvature; 3 Stress in anisotropic and patterned films; 4 Delamination and fracture; Film buckling, bulging and peeling; 6 Dislocation formation in epitaxial systems; 7 Dislocation interactions and strain relaxation; 8 Equilibrium and stability of surfaces; 9 The role of stress in mass transport; References; Author index; Subject index
    摘要、提要註: Thin films play an important role in many technological applications which include: microelectronic devices, magnetic storage media and surface coatings. Highly illustrated and containing numerous homework problems, this book will be essential reading on senior undergraduate and graduate courses on thin films.
    電子資源: Click here to view book
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