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Handbook of sputter deposition techn...

Hayakawa Shigeru

Handbook of sputter deposition technology: principles, technology and applications

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
書名/作者:	Handbook of sputter deposition technology: principles, technology and applications/ Hayakawa, Shigeru;Wasa, Kiyotaka
作者:	Hayakawa Shigeru
其他作者:	Wasa Kiyotaka
出版者:	New Jersey : Noyes Publications, 1992
面頁冊數:	304頁; 24x16公分
標題:	Cathode sputtering
標題:	Thin films
ISBN:	0815512805(精裝)

Handbook of sputter deposition technology: principles, technology and applications
Hayakawa Shigeru

Handbook of sputter deposition technology: principles, technology and applicationsHayakawa, Shigeru;Wasa, Kiyotaka - New JerseyNoyes Publications1992 - 304頁24x16公分

ISBN: 0815512805(精裝)Subjects--Topical Terms:

169637
Cathode sputtering

Handbook of sputter deposition technology: principles, technology and applications
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