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ElwenspoekM.
Overview
Works:
0 works in 2 publications in 1 languages
Titles
Silicon micromachining
by: ElwenspoekM.; JansenH.
(Language materials, printed)
Mechanical microsensors
by: ElwenspoekM.; WiegerinkR.
(Language materials, printed)
Subjects
Silicon.
Micromachining.
Transducers.
Mircroelectromechical system..
Detectors--Design and const..
Etching.
Processing
...
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