大葉大學圖書館 |

Introduction to microsystem design[electronic resource] /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.381
書名/作者:	Introduction to microsystem design/ by Werner Karl Schomburg.
作者:	Schomburg, Werner Karl.
出版者:	Berlin, Heidelberg : : Springer Berlin Heidelberg :, 2015.
面頁冊數:	xxiv, 374 p. : : ill., digital ;; 24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems - Design and construction.
標題:	Engineering.
標題:	Electronics and Microelectronics, Instrumentation.
標題:	Circuits and Systems.
標題:	Nanotechnology and Microengineering.
ISBN:	9783662470237 (electronic bk.)
ISBN:	9783662470220 (paper)
內容註:	Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
摘要、提要註:	This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
電子資源:	http://dx.doi.org/10.1007/978-3-662-47023-7

Introduction to microsystem design[electronic resource] /
Schomburg, Werner Karl.

Introduction to microsystem design[electronic resource] /by Werner Karl Schomburg. - 2nd ed. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xxiv, 374 p. :ill., digital ;24 cm. - RWTHedition,1865-0899. - RWTHedition..

Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

ISBN: 9783662470237 (electronic bk.)

Standard No.: 10.1007/978-3-662-47023-7doiSubjects--Topical Terms:

344152
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Introduction to microsystem design[electronic resource] /
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