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[ subject:"Microelectromechanical systems" ]
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Micro mechanical systems[electronic ...
~
Fukuda, T. (1948-)
Micro mechanical systems[electronic resource] :principles and technology /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
杜威分類號:
621
書名/作者:
Micro mechanical systems : principles and technology // edited by T. Fukuda and W. Menz.
其他作者:
Fukuda, T.
出版者:
Amsterdam ; : Elsevier,, 1998.
面頁冊數:
viii, 268 p. : : ill. ;; 25 cm.
標題:
Microelectromechanical systems - Handbooks, manuals, etc.
ISBN:
9780444823632 (electronic bk.)
ISBN:
9780444823632
書目註:
Includes bibliographical references.
電子資源:
http://www.sciencedirect.com/science/book/9780444823632
Micro mechanical systems[electronic resource] :principles and technology /
Micro mechanical systems
principles and technology /[electronic resource] :edited by T. Fukuda and W. Menz. - Amsterdam ;Elsevier,1998. - viii, 268 p. :ill. ;25 cm. - Handbook of sensors and actuators ;v. 6.
Includes bibliographical references.
ISBN: 9780444823632 (electronic bk.)
LCCN: 98020529 Subjects--Topical Terms:
574233
Microelectromechanical systems
--Handbooks, manuals, etc.
LC Class. No.: TJ163 / .M48 1998
Dewey Class. No.: 621
Micro mechanical systems[electronic resource] :principles and technology /
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http://www.sciencedirect.com/science/book/9780444823632
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