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Thin film materials technology[elect...

Adachi, Hideaki.

Thin film materials technology[electronic resource] :sputtering of compound materials /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
杜威分類號:	621.3815/2
書名/作者:	Thin film materials technology : sputtering of compound materials // by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
作者:	Wasa, Kiyotaka.
其他作者:	Kitabatake, Makoto.
出版者:	Norwich, NY : : William Andrew Pub. ;, c2004.
面頁冊數:	xiv, 518 p. : : ill. ;; 24 cm.
標題:	Cathode sputtering (Plating process) - Handbooks, manuals, etc.
標題:	Thin films.
ISBN:	9780815514831 (electronic bk.)
ISBN:	9780815514831
書目註:	Includes bibliographical references and index.
電子資源:	http://www.sciencedirect.com/science/book/9780815514831

Thin film materials technology[electronic resource] :sputtering of compound materials /
Wasa, Kiyotaka.

Thin film materials technologysputtering of compound materials /[electronic resource] :by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. - Norwich, NY :William Andrew Pub. ;c2004. - xiv, 518 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780815514831 (electronic bk.)

LCCN: 2003018016Subjects--Topical Terms:

553694
Cathode sputtering (Plating process)
--Handbooks, manuals, etc.

LC Class. No.: TS695 / .W38 2004

Dewey Class. No.: 621.3815/2

Thin film materials technology[electronic resource] :sputtering of compound materials /
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020 $a 9780815514831 (electronic bk.)
020 $a 9780815514831
035 $a 13000340
040 $a DLC $c DLC $d DLC $d DLC
041 0 $a eng
042 $a pcc
050 0 0 $a TS695 $b .W38 2004
082 0 0 $a 621.3815/2 $2 22
100 1 $a Wasa, Kiyotaka. $3 553691
245 1 0 $a Thin film materials technology $h [electronic resource] : $b sputtering of compound materials / $c by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
260 $a Norwich, NY : $b William Andrew Pub. ; $a Heidelberg : $b Springer, $c c2004.
300 $a xiv, 518 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Cathode sputtering (Plating process) $v Handbooks, manuals, etc. $3 553694
650 0 $a Thin films. $3 183807
700 1 $a Kitabatake, Makoto. $3 553848
700 1 $a Adachi, Hideaki. $3 553849
856 4 0 $u http://www.sciencedirect.com/science/book/9780815514831

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